Optimtized Power Delivery to Meet Semiconductor Etch Application Needs
The Power Supply Controller (PSC) is the result of years of accumulated customer feedback, testing and development. The PSC modules are an interchangeable alternative to legacy models PSC 4400, PSC 8800 and PSC-2. The PSC platform is designed to provide optimal power to each POU / Semistat / Recirculating Chiller Module. The PSC platform is designed to be transparent to all Semistat / POU modules, and to all Etch tool types and applications.
CE, SEMI S2 and SEMI F47 Compliant